PPPL-3170 is available in pdf or postscript formats.

Calculation and Analysis of Electron Trajectories in a Photocathode Electron Projection Reduction System

Authors: L. P. Ku, et al.

This report provides a summary of the work performed under the "quick response CRADA" PPPL-95-006. The purpose of the CRADA is to investigate the feasibility of pattern reduction in the photoelectron projection lithography using converging magnetic fields. We analyzed and numerically simulated the trajectories of electrons in a realizable system. We show magnet and electrical grid configurations capable of projecting and reducing images with feature sizes on the order of 0.1 mm. Distortions less than 10-6 and spot sizes <20 nm appear to be achievable.